| 摘要 |
PCT No. PCT/JP92/01265 Sec. 371 Date Apr. 25, 1994 Sec. 102(e) Date Apr. 25, 1994 PCT Filed Oct. 1, 1992 PCT Pub. No. WO93/07470 PCT Pub. Date Apr. 15, 1993An analyzer capable of detecting a light element, such as Na, capable of evaluating a sample having an uneven surface, such as a pattern-carrying wafer without destroying and damaging the same. The analyzer is of simple construction, is simple in operation, is safe for the human body, and is capable of identifying the composition of a minute amount of impurities and fine particles deposited on the surface of a sample. The analyzer has a sample retaining stage, an ultraviolet ray-emitting light source, a collector for collecting the ultraviolet rays generated by the light source and for applying the resultant rays to the surface of a sample, and a detector for detecting the light emitted from the surface of the sample to which the ultraviolet rays have been applied.
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