发明名称 Thin film reinforcing structure and method for manufacturing the same
摘要 The invention relates to a reinforcing structure for a thin film, particularly for an ultrathin film permeable to X-ray and ultraviolet radiation, and a method for manufacturing a reinforcing structure for a thin film with a thickness less than 5 micrometers. According to the invention, on the surface of the thin film, there is formed, in a bakeing treatment of at least one step, a reinforcing structure made of some photosensitive material such as polymer.
申请公布号 US5578360(A) 申请公布日期 1996.11.26
申请号 US19950447737 申请日期 1995.05.23
申请人 OUTOKUMPU INSTRUMENTS OY 发明人 VIITANEN, VELI-PEKKA
分类号 G03F7/00;G03F7/09;H01J5/18;H01J47/00;(IPC1-7):B32B3/10 主分类号 G03F7/00
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