| 摘要 |
<p>An organometallic lead precursor, represented by following formula:Lx.Pb(THD)2[I]wherein L is an electron donor ligand selected from the group consisting of NR3 (R=H, CH3) gas and Cl2 gas; THD denotes 2,2',6,6'-tetramethyl-3,5-heptanedione; and x is in the range of 0.5 to 2, is prepared by flowing a gas phase electron donor into a bubbler containing bis (2,2',6,6'-tetramethyl-3,5-heptanedione)Pb at a predetermined temperature, to synthesize, in-situ, an adduct. The precursor exhibits a remarkable improvement in volatility, and in stability at the vaporization point. Lead-titanium based thin films prepared from the precursor, display superior reproducibility and reliability.</p> |
