发明名称 REFLECTION TYPE ELECTRONNDIFFRACTION METHOD
摘要 PURPOSE:To develop a surface crystal diffraction microscopic method for displaying the surface distribution of the intensity of the diffraction ray in an arbitray analyzing method for very small region of the surface crystal, under a condition keeping a constant incident angle of the primary electron ray into the specimen surface.
申请公布号 JPS5359486(A) 申请公布日期 1978.05.29
申请号 JP19760134056 申请日期 1976.11.10
申请人 HITACHI LTD 发明人 HAYAKAWA KAZUNOBU
分类号 G01N23/207;H01J37/295 主分类号 G01N23/207
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