Confocal optical scanner

摘要

A confocal optical scanner which realizes optical scanning without nonuniformity of brightness at the inside and outside periperies of the pinhole disk by arraying the pinholes along spiral tracks at the same pitch; which allows adjustment of decentering to be readily performed by disposing pinholes so that stripes do not occur even when decentering is large; which allows more incident light to be collected at the pinholes through a plurality of collector means by disposing the pinholes at focal points of the collector means; which improves luminous utilization efficacy by reducing the illumination area of light by adopting the collector means to focus outside of the aperture pupil; which prevents decrease of confocal resolution due to pinhole diameter by causing the light reflected from the sample to not enter a collector disk; and which reduces stray light from the pinhole disk by covering non-collector portions of the collector disk with a shading film.