发明名称 Method and device for the correction of measurement errors due to vibrations in coordinate measuring devices
摘要 For the correction of measurement errors, due to vibration, of coordinate measuring devices, the time course of the interfering vibrations is stored by means of sensors (ax, ay, az) on a vibrating portion of the coordinate measuring device. The measured values of the sensors are adjusted with previously determined and stored correction parameters, which describe the natural frequency ( nu ) and the damping constants ( delta ) of the vibrations and also the amplitude and phase information of the characteristic modes (Gr) of the vibrations contributing to the interfering vibrations. The measurement errors, due to vibration, of the coordinate measuring device at the instant of probing are then calculated from the time course of the corrected measurement values of the sensors (ax, ay, az).
申请公布号 US5579246(A) 申请公布日期 1996.11.26
申请号 US19940353595 申请日期 1994.12.12
申请人 CARL-ZEISS-STIFTUNG 发明人 EBERSBACH, PETER;M+E,UML U+EE LLER, HELMUT
分类号 G01B21/04;(IPC1-7):G01B5/008;G01B7/008 主分类号 G01B21/04
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