| 摘要 |
<p>PURPOSE: To obtain a stage for detecting interference between axes positionally in an inexpensive and space-saving manner and with high accuracy. CONSTITUTION: A movable part 3 has a base 1 to which the whole of a stage is fixed, a guide 2 for the motion of the stage in the direction (x), reference faces 3a, 3b and 3c being perpendicular to the axis (y) and a reference face 3d being perpendicular to the axis (z). Length measuring sensors 4 to 6 are provided at an interval of 120 deg. around the axis (y), at an equal distance (a) from the axis (y) and in the direction of (+) of the axis (y) of the reference faces 3a to 3c and retained by support fittings from the base so that they may not move in relation to the base positioned on the rear side of the guide 2, and measure the position in the direction (y) of each reference face, while length measuring sensors 7 to 9 are provided at an interval of 120 deg. around the axis (z), at an equal distance (b) from the axis (z) and in the direction of (+) of the axis (z) of the reference face 3d and retained by support fittings from the base 1 so that they may not move in relation to the base 1, and measure the position in the direction (z) of the reference face 3d.</p> |
