发明名称 QUANTUM SEMICONDUCTOR AND ITS MANUFACTURE
摘要 PURPOSE: To manufacture this quantum semiconductor device including a quantum case by a step including the dry-etching step of a substrate. CONSTITUTION: A pyramidical etch pit sectioned of sidewall faces made of (110) faces is formed by anisotropical step on the (111) A face of a zinc-blend type substrate so as to deposit a quantum well layer sandwitched by a pair of barrier layers on this etch pit.
申请公布号 JPH08306906(A) 申请公布日期 1996.11.22
申请号 JP19950341871 申请日期 1995.12.27
申请人 FUJITSU LTD 发明人 SAKUMA YOSHIKI
分类号 H01L29/06;H01L29/66;(IPC1-7):H01L29/06 主分类号 H01L29/06
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