发明名称 |
MIRROR ATTITUDE ADJUSTING METHOD AND MIRROR ATTITUDE DETECTING EQUIPMENT |
摘要 |
PURPOSE: To reduce the time needed for adjustment work by immediately detecting the attitude of a mirror from the result of measurement of a pinhole image. CONSTITUTION: A mirror attitude detecting equipment is constituted of a pinhole board 10 and two sheets of detecting boards 11, 12. The position and the angle of a first curved surface mirror 3 are measured from a pinhole image on the first detecting board 11. The degree of deviation of the position and the angle of the first curved surface mirror 3 from the desired angle and position is detected, and the angle and the position of the first curved surface mirror 3 are adjusted by the difference. In the same way, the deviation of the position and the angle of the second curved surface mirror 4 is measured from a pinhole image on the second detecting boards 12. The angle and the position of the second curved surface mirror 4 are adjusted by the difference. |
申请公布号 |
JPH08306611(A) |
申请公布日期 |
1996.11.22 |
申请号 |
JP19950107338 |
申请日期 |
1995.05.01 |
申请人 |
NIPPON TELEGR & TELEPH CORP <NTT> |
发明人 |
KURODA KENICHI;KANEKO TAKASHI |
分类号 |
G02B7/00;G02B7/198;G03F7/20;H01L21/027;(IPC1-7):H01L21/027 |
主分类号 |
G02B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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