| 摘要 |
PURPOSE: To provide a method for replacing a substrate in which the time required for replacing a substrate with respect to the substrate mounting table at a processing section can be shortened. CONSTITUTION: A processed substrate on a substrate mounting table Tb is replaced by an unprocessed substrate by means of first and second substrate transfer hands 15U, 15L. In this process, the first substrate transfer hand 15U is advanced below the substrate mounting table Tb (Step S1) and then the first substrate transfer hand 15U is moved upward in order to receive a processed substrate Wb from the substrate mounting table Tb, while substantially at the same time, the second substrate transfer hand 15L mounting an unprocessed substrate is moved above the substrate mounting table Tb (Step S2). Subsequently, the first substrate transfer hand 15U is retreated from the processing section, while substantially at the same time, the second substrate transfer hand 15L is advanced above the substrate mounting table Tb (Step S3). Finally, the second substrate transfer hand 15L is lowered (Step S4) and the second substrate transfer hand 15L is retreated from the processing section (Step S5). |
