| 摘要 |
PURPOSE: To increase the density of a capacitor element which uses ferroelectric material and reduce the driving voltage by efficiently use the residual polarization of the laminar bismuth ferroelectric material. CONSTITUTION: A capacitor which uses laminar bismuth ferroelectric material of c-axis orientation is provided by arranging a pair of electrodes 1 which are composed of a first and second electrodes, and permitting the pair of electrodes 1 to have relative position relation that generates an electric field in a direction parallel to a substrate 3 at a part within the ferroelectric material 2. The pair of electrodes 1 are preferably arranged so as to apply the electric field in the maximum polarization direction or mainly in such direction. After forming the laminar bismuth ferroelectric material 2 of c-axis orientation, the maximum polarization direction of the film is detected, and the capacitor is provided by the manufacture that forms the pair of electrodes 1 which apply electric field mainly in this direction. |
