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发明名称
FORMATION OF INSULATING FILM OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH08306686(A)
申请公布日期
1996.11.22
申请号
JP19950132917
申请日期
1995.05.02
申请人
SONY CORP
发明人
KURIHARA HISAAKI
分类号
H01L21/768;H01L21/316;H01L21/318;(IPC1-7):H01L21/318
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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