| 摘要 |
PURPOSE: To provide an oriented ferroelectric film which is oriented at the polarization orientation rate of 100% or so even if it is formed of ferroelectric ceramic material which is hard to be turned into single crystal by a method wherein a ferroelectric material layer is formed by an electrophoretic method, and then heat treated into an orientated ferroelectric film. CONSTITUTION: Red lead, titanium oxide, and zirconium oxide are wet-mixed together with a ball mill into a mixture, the mixture is dried up and then calcined into ferroelectric ceramic material powder of average grain size 0.8μm. Acetone 50ml and 5g of the material powder are put in a 100ml beaker, mixed together, and dispersed by ultrasonic vibrations into slurry of powder material. A pair of platinum plate 20μm square are dipped as electrodes separate from each other into the slurry, a direct-current 50V/cm is applied between the electrodes for one minute to electrodeposit the material powder for the formation of a ferroelectric ceramic material layer 50μm thick. The ferroelectric ceramic material layer is heat treated together with the platinum plate at a temperature of 1250 deg.C for one hour. By this setup, an orientated ferroelectric ceramic film can be obtained, and a piezoelectric device equipped with the ceramic film can be manufacture. |
