MAGNETIC RECORDING MEDIUM AND ITS PRODUCTION

摘要

PURPOSE: To obtain a magnetic recording medium having high reproduction output and fit for high density recording by forming a magnetic film as a lower layer on a substrate by sputtering and further forming a magnetic film on the lower magnetic film by vapor deposition. CONSTITUTION: A substrate 1 is allowed to run from the feeding roll of a magnetron sputtering device to the winding roll. The vacuum vessel of the device is evacuated to about 10<-6> -10<-7> Torr degree of vacuum and a magnetic film 2 of Co having 150Åthickness is formed on the substrate 1 by magnetron sputtering using a target made of magnetic metal Co. The winding roll on which the substrate 1 with the formed magnetic film 2 has been wound is then set on the feed side of an oblique vapor deposition device and the substrate 1 is allowed to run along a cooling can roll. The vacuum vessel of the device is evacuated to 10<-4> -10<-6> Torr and magnetic metal Co in a crucible is melted and evaporated by heating with electron beams to form a magnetic film 3 of Co having 1,800Åthickness and 1,600Oe coercive force on the magnetic film 2 by oblique vapor deposition. The objective magnetic recording medium fit for high density recording is obtd. with satisfactory productivity.