METHOD AND APPARATUS FOR MEASUREMENT OF PROFILE OF SUBSTRATE,申请号JP19950137499-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR MEASUREMENT OF PROFILE OF SUBSTRATE
摘要
申请公布号	JPH08304028(A)	申请公布日期	1996.11.22
申请号	JP19950137499	申请日期	1995.05.12
申请人	HOYA CORP	发明人	HIRANO MASAO
分类号	G01B11/02;G01N21/84;(IPC1-7):G01B11/02	主分类号	G01B11/02
代理机构		代理人
主权项
地址

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