| 摘要 |
<p>PURPOSE: To enable simultaneous measurement of information pertaining to changes in the shape of the surface, composition and condition of a sample by setting an application means of a specified physical quantity, a control means for scanning the surface of the sample in a highly vacuum container to perform a measurement by electrons from the sample to be measured with a vacuum scan type microscope. CONSTITUTION: A measuring sample 2 is fixed on a movable sample stage 3 and a conductive probe 1 is supported on a piezoelectric element 4 for driving the probe 1. An AC voltage varying at a specified cycle is applied to the sample 2 from a voltage supply unit 5. As the probe 1 is brought closer to the sample 2, a tunnel current flows through the probe 1. This current is converted to a voltage signal by a current-voltage conversion circuit 6 and the signal only synchronizing the AC voltage applied to the sample 2 from the voltage supply unit 5 is extracted by a lock-in amplifier 15 to be sent to a feedback circuit 8 through a logarithmic circuit 7. A voltage signal X-Y scan signal for driving of the feedback circuit 8 and a Z-way control signal are inputted into a display device 9 to obtain a topography of the surface of the sample.</p> |
