发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE: To connect a semiconductor chip with an auxiliary wiring board piece at high conduction success rate by connecting the semiconductor chip through a metal bump with the auxiliary wiring board piece while sucking the auxiliary wiring board piece to a smooth base. CONSTITUTION: The semiconductor device comprises an inner electrode 21 to be connected with the electrode 11 of a semiconductor chip 1, an outer electrode 22 to be connected with the end of conductor of a circuit board piece to be mounted, and an interconnection conductor 23 stretching between the electrodes 21, 22. An auxiliary wiring board piece 2 provided with such wiring pattern on plastic films 24, 25 is connected, on the inner electrode 21 side, with the electrode 11 of semiconductor chip 1 through a metal bump 211. Furthermore, the gap between the auxiliary wiring board piece 2 and the semiconductor chip 1 is filled with a sealing resin 3 thus producing a semiconductor device. In this regard, the auxiliary wiring board piece 2 is connected with the semiconductor chip 1 through a metal bump 231 while sucking the auxiliary wiring board piece 2 to a smooth base 4. For example, the auxiliary wiring board piece 2 is secured to a low pressure suction smooth base 4 and the semiconductor chip 1 is thermocompresed before being resin sealed.
申请公布号 JPH08306735(A) 申请公布日期 1996.11.22
申请号 JP19950127282 申请日期 1995.04.27
申请人 NITTO DENKO CORP 发明人 TANIGAWA SATOSHI;IGARASHI KAZUMASA;NAGASAWA TOKU;YOSHIO NOBUHIKO;USUI HIDEYUKI;ITOU HISATAKA
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
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