| 摘要 |
PURPOSE: To obtain an optical module capable of forming an optical waveguide without alignment. CONSTITUTION: A laser diode 11 is formed on a semiconductor substrate 10 and after a laser resonator end face 13 is formed by dry etching, first to third dielectric thin films 15, 16, 17 are successively formed. These first to third dielectric thin films 15, 16, 17 are worked to an optical waveguide shape with the light emitting part 12 of a laser diode 11 as an earmark. The optical waveguide is formed without the adjustment of optical axis alignment by using the first to third dielectric thin films 15, 16, 17 having low loss to light in such a manner. |
