METHOD FOR EVALUATING QUALITY OF SILICON WAFER,申请号JP19950111980-传众专利搜索

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发明名称	METHOD FOR EVALUATING QUALITY OF SILICON WAFER
摘要
申请公布号	JPH08306753(A)	申请公布日期	1996.11.22
申请号	JP19950111980	申请日期	1995.05.10
申请人	NIPPON STEEL CORP	发明人	DEAI HIROYUKI;IWASAKI TOSHIO
分类号	H01L21/66;(IPC1-7):H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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