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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH08306598(A)
申请公布日期
1996.11.22
申请号
JP19950103792
申请日期
1995.04.27
申请人
HITACHI LTD;HITACHI DEVICE ENG CO LTD
发明人
HIRANO KENTA
分类号
H01L21/02;(IPC1-7):H01L21/02
主分类号
H01L21/02
代理机构
代理人
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