PROCESS FOR PRODUCING A DFB LASER DIODE WITH COUPLED WAVEGUIDE AND DFB LASER DIODE FILM STRUCTURE

摘要

It is possible with the process of the invention to produce MRCW high-temperature laser diodes with coupled optical waveguides in four epitaxy steps, in which preferably the first and last two epitaxies are performed virtually immediately after one another and an interruption is needed only to produce a grid. It is possible to make other components, e.g. photodiodes, using the process of the invention.