发明名称 Positive type photoresist composition comprising a novolak resin made with a silica-magnesia solid catalyst
摘要 A novel positive type photoresist composition is provided, comprising an alkali-soluble novolak resin obtained by the condensation of substituted or unsubstituted phenols and aldehydes in the presence of a silica-magnesia solid catalyst and a light-sensitive material containing 1,2-naphthoquinone-diazido-5-(and/or -4-) sulfonate as main component.
申请公布号 US5576139(A) 申请公布日期 1996.11.19
申请号 US19910783346 申请日期 1991.10.28
申请人 FUJI PHOTO FILM CO., LTD. 发明人 UENISHI, KAZUYA;TAN, SHIRO;KAWABE, YASUMASA;KOKUBO, TADAYOSHI
分类号 C08G8/08;C08L61/04;C08L61/06;G03F7/022;G03F7/023;H01L21/027;(IPC1-7):G03F7/023 主分类号 C08G8/08
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