CLEAN ROOM BUILDING STRUCTURE

摘要

PURPOSE: To effectively use a restricted site area, obviating the need of a site for constructing a utility building for a machine room or a servicing room, and form environment under the control of a vibration, and base isolation environment against the medium and small scale of an earthquake. CONSTITUTION: A clean room 10 has a utility building section 14 to install machinery for the air conditioning and servicing systems of a clean room 18 or the like via a vibration eliminator 12, in such a state as constructed on a body building section 11 forming the room 18 internally. Furthermore, a water tank 16 is provided as integral part of the section 11 in a basement as the bottom thereof.