| 摘要 |
PURPOSE: To efficiently and selectively remove a part of the electrode formed on the inner surface of each of grooves. CONSTITUTION: A large number of grooves becoming ink chambers 2 are formed to a piezoelectric ceramics substrate 1 and electrodes are formed to the entire inner surfaces of the grooves. The electrodes formed on the bottom surfaces of the grooves are irradiated with YAG laser beam 10 with a wavelength of 1.06μm to remove the electrodes on the bottom surfaces of the grooves. By this method, the electrodes in the grooves are separated to form electrodes 9. A lid having ink supply ports is bonded to the surface on the groove processing side of the piezoelectric ceramics substrate 1 to form the ink chambers 2. A nozzle plate is bonded to the piezoelectric ceramics substrate 1 and one end surface of the lid so that nozzles correspond to one ends of the ink chambers 2.
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