Micromechanical actuator

摘要

The device has a piezoceramic substrate (1) with a free surface (1) and an electro- or magnetostrictive material which curtails an electrical or magnetic field in a given direction (3) when a voltage is applied. Two blocks (4) rigidly attached to the free surface at a distance apart lie on a line parallel to the given direction. An at least partially flexible switching element (5) mounted on the blocks connects them but does not contact the free surface. In a first position reached without the voltage or field applied, the switching element is free from forces acting via the blocks. In a second position, reached with the voltage and field applied, the switching element changes to a clamped state with changed shape.