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发明名称
Verfahren und Anordnung zum Zerstäuben eines Materials mittels Hochfrequenz
摘要
申请公布号
DE3706698(C2)
申请公布日期
1996.11.14
申请号
DE19873706698
申请日期
1987.03.02
申请人
BALZERS AG, BALZERS, LI
发明人
WELLERDIECK, KLAUS, SEVELEN, CH;WEGMANN, URS, OBERSCHAN, CH;HOEFLER, KARL, DIPL.-PHYS. DR., BUCHS, CH
分类号
C23C14/40;C23C14/35;C23F4/00;H01J37/32;H01J37/34;H01L21/302;H01L21/3065;(IPC1-7):C23F4/00;H05H1/46
主分类号
C23C14/40
代理机构
代理人
主权项
地址
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