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发明名称
Isolationsverfahren für integrierte Schaltungen
摘要
申请公布号
DE3751920(D1)
申请公布日期
1996.11.14
申请号
DE19873751920
申请日期
1987.07.03
申请人
TEXAS INSTRUMENTS INC., DALLAS, TEX., US
发明人
CHAPMAN, RICHARD A., DALLAS TEXAS 75240, US;TENG, CLARENCE WAN-HSN, PLANO TEXAS 75075, US
分类号
H01L21/316;H01L21/76;H01L21/762;(IPC1-7):H01L21/76;H01L21/32
主分类号
H01L21/316
代理机构
代理人
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地址
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