发明名称 METHOD AND DEVICE FOR THE WET PROCESSING OF SUBSTRATES IN A CONTAINER
摘要 Proposed is a method for wet-processing substrates in a vessel into which a liquid is fed and is removed again through an overflow device. The method is particularly simple to carry out if the overflow device floats on the liquid and descends and/or rises as the liquid surface descends and/or rises. No mechanical devices are needed to raise the substrates and remove them from the liquid. Also proposed are devices for the wet-processing of substrates by the method proposed.
申请公布号 CA2217777(A1) 申请公布日期 1996.11.14
申请号 CA19962217777 申请日期 1996.05.02
申请人 STEAG MICROTECH GMBH 发明人 HARMS-JANSSEN, HELMUTH;DENZLER, LUDWIG
分类号 B08B3/04;B01D21/24;H01L21/00;H01L21/304;H01L21/306;(IPC1-7):B05C3/109 主分类号 B08B3/04
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