发明名称 |
METHOD AND DEVICE FOR THE WET PROCESSING OF SUBSTRATES IN A CONTAINER |
摘要 |
Proposed is a method for wet-processing substrates in a vessel into which a liquid is fed and is removed again through an overflow device. The method is particularly simple to carry out if the overflow device floats on the liquid and descends and/or rises as the liquid surface descends and/or rises. No mechanical devices are needed to raise the substrates and remove them from the liquid. Also proposed are devices for the wet-processing of substrates by the method proposed.
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申请公布号 |
CA2217777(A1) |
申请公布日期 |
1996.11.14 |
申请号 |
CA19962217777 |
申请日期 |
1996.05.02 |
申请人 |
STEAG MICROTECH GMBH |
发明人 |
HARMS-JANSSEN, HELMUTH;DENZLER, LUDWIG |
分类号 |
B08B3/04;B01D21/24;H01L21/00;H01L21/304;H01L21/306;(IPC1-7):B05C3/109 |
主分类号 |
B08B3/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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