发明名称 |
Electrically programmable antifuse element and method of forming it |
摘要 |
<p>An electrically programmable antifuse element incorporates a composite interlayer of dielectric material and amorphous silicon interposed between two electrodes. The lower electrode may be formed from a refractory metal such as tungsten. Preferably, a thin layer of titanium is deposited over the tungsten layer and its surface is then oxidized to form a thin layer of titanium oxide which serves as the dielectric material of the composite dielectric/amorphous silicon interlayer. A layer of amorphous silicon is then deposited on top of the titanium oxide dielectric to complete the formation of the composite interlayer. A topmost layer of a refractory metal such as tungsten is then applied over the amorphous silicon to form the topmost electrode of the antifuse. <IMAGE></p> |
申请公布号 |
EP0452091(B1) |
申请公布日期 |
1996.11.13 |
申请号 |
EP19910303116 |
申请日期 |
1991.04.09 |
申请人 |
ACTEL CORPORATION |
发明人 |
MCCOLLUM, JOHN L.;CHEN, SHIH-OU |
分类号 |
H01L27/10;H01L21/8247;H01L23/525;H01L23/532;H01L27/115;(IPC1-7):H01L23/525 |
主分类号 |
H01L27/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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