发明名称 Robot assembly
摘要 <p>A robot mechanism is disclosed which mechanism comprises a motor chamber containing first and second motors, a robot chamber containing first and second rotatable members and a movable robot arm, the motor chamber and the robot chamber having an airtight seal between them, means for coupling rotational movement of the first and second motors to the first and second rotatable members, respectively, in the robot chamber, first and second pivot arms of equal length attached to the fist and second rotatable members, respectively, a workpiece support and third and fourth pivot arms of the same length as each other, coupled to the first and second pivot arms, respectively, and to the workpiece support, wherein the first, second, third and fourth pivot arms cooperate to convert rotational movements of the first and second rotatable members into a desirable combination of rotational movement and linear radial movement of the robot arm. &lt;IMAGE&gt;</p>
申请公布号 EP0742084(A2) 申请公布日期 1996.11.13
申请号 EP19960112331 申请日期 1993.04.22
申请人 APPLIED MATERIALS, INC. 发明人 GRUNES, HOWARD
分类号 B25J18/02;B25J9/06;B25J9/10;H01L21/673;(IPC1-7):B25J9/10 主分类号 B25J18/02
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