发明名称 |
Barrier seal for electrostatic chuck |
摘要 |
<p>An erosion resistant electrostatic chuck 20 for holding a substrate 45 having a peripheral edge 50, in an erosive environment, comprises an electrostatic member 25 including (i) an electrode 30, and (ii) an insulator 35 covering the electrode. A barrier 55 is circumferentially disposed about the electrostatic member 25. The barrier 55 comprises a first contact surface 60 capable of being pressed against the peripheral edge 50 of the substrate 45 to form a seal around the substrate 45 to reduce exposure of the electrostatic member 25 of the chuck 20 to the erosive environment. <IMAGE> <IMAGE></p> |
申请公布号 |
EP0742580(A2) |
申请公布日期 |
1996.11.13 |
申请号 |
EP19960303278 |
申请日期 |
1996.05.10 |
申请人 |
APPLIED MATERIALS, INC.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
SALFELDER, JOSEPH;GRIMARD, DENNIS;CAMERON, JOHN F.;DESHPANDEY, CHANDRA;RYAN, ROBERT;CHAFIN, MICHAEL G. |
分类号 |
H02N13/00;H01L21/683;(IPC1-7):H01L21/00 |
主分类号 |
H02N13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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