Diamond film and method of producing same

摘要

Diamond cannot be epitaxially grown on any materials except diamond. Polycrystalline diamond is useless for an application as a material of semiconductor devices in general. In order to make a quasi-single crystal, small diamond granules are epitaxially grown on a single crystal substrate whose lattice constant is similar to that of diamond, a deposition layer is formed on the island diamond granules. The initial substrate is eliminated. Diamond is grown on the deposition layer having diamond granules to be a film with a certain thickness. The initially-grown diamond granules which have the same crystallographical direction align in order the directions of crystals of the latter-grown diamond by playing a role of seed crystals.