Plasma processing apparatus,申请号GB19960020150-传众专利搜索

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发明名称	Plasma processing apparatus
摘要
申请公布号	GB9620150(D0)	申请公布日期	1996.11.13
申请号	GB19960020150	申请日期	1996.09.27
申请人	SURFACE TECHNOLOGY SYSTEMS LIMITED	发明人
分类号		主分类号
代理机构		代理人
主权项
地址

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