| 摘要 |
PURPOSE: To provide a cantilever having high resolution without impairing the self-strain detecting function by forming a self-strain quantity detecting means with a piezoelectric thin film and electrodes formed on it. CONSTITUTION: This cantilever is provided with at least a flexible plate and a self-strain quantity detecting means formed on one face of the flexible plate. The flexible plate is formed with a silicon nitride film 3 on a silicone monocrystal 2. The self-strain quantity detecting means is constituted of a piezoelectric thin film 7, an upper electrode 8 formed on the piezoelectric thin film 7, and a lower electrode formed between the piezoelectric thin film 7 and the flexible plate. The upper electrode 8, the lower electrode, and lead extraction portions 6 are formed by the deposition of platinum. When the thickness of the piezoelectric thin film 7 and the thickness of the cantilever except for the piezoelectric thin film 7 and electrode portions are set to proper values, the strain in the thickness direction can be mitigated, and the bend owing to the residual strain is reduced. |
