RESIN SEALING EQUIPMENT AND CLEANING METHOD THEREOF,申请号JP19950127336-传众专利搜索

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发明名称	RESIN SEALING EQUIPMENT AND CLEANING METHOD THEREOF
摘要
申请公布号	JPH08298270(A)	申请公布日期	1996.11.12
申请号	JP19950127336	申请日期	1995.04.26
申请人	MITSUBISHI ELECTRIC CORP	发明人	HARADA HIROYOSHI
分类号	B29C45/02;B29C45/14;H01L21/56;(IPC1-7):H01L21/56	主分类号	B29C45/02
代理机构		代理人
主权项
地址

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