| 摘要 |
PURPOSE: To support a rotary body of larger weight by improving the load capacity in the axial direction. CONSTITUTION: A bearing device is provided with a vacuum chamber 1 and a rotary body 2 which is rotated around the vertical axis. The vacuum chamber 1 has the downwardly directed surface and the upwardly directed surface, and the rotary body 2 has the upwardly directed surface opposite to the downwardly directed surface of the vacuum chamber 1 and the downwardly directed surface opposite to the upwardly directed surface of the vacuum chamber 1. A control type axial magnetic bearing 9 to energize the rotary body 2 upward by the attraction is provided between the downwardly directed surface of the vacuum chamber 1 and the upwardly directed surface of the rotary body 2. The control type axial magnetic bearing 9 is provided with an electromagnet 16 on the vacuum chamber 1 side and a ferromagnetic body 20 on the rotary body 2 side. A super-conductive bearing 11 to energize the rotary body 2 upwardly by the repulsion is provided between the upwardly directed surface of the vacuum chamber 1 and the downwardly directed surface of the rotary body 2. The super-conductive bearing 11 consists of a vertically movable super-conductive body part 33 on the vacuum chamber 1 side, and a permanent magnet part 32 on the rotary body 2 side. |
