| 摘要 |
PURPOSE: To produce a metallic material excellent in corrosion and wear resistances by forming a film enriched with Cr and/or Ni on the surface layer part of an Fe alloy and then forming a hard ceramic film thereon. CONSTITUTION: Cr ion and/or Ni ion are implanted in the surface layer part of an Fe alloy with an energy of >=20keV, and an enriched layer is formed at an implantation of >=1×1017 ions/cm<2> . A hard ceramic film (TiN film) is then formed on the enriched layer by physical vapor deposition. Since these treatments are conducted at a low temp. of <=200 deg.C, a heat history is not included, the mechanical properties of a substrate are not deteriorated, and a material having corrosion and wear resistances is obtained without being limited to a specified material such as stainless steel.
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