发明名称 |
Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits |
摘要 |
The disclosure discusses impedance matching circuits based on parallel-resonant L-C tank circuits, and describes a low-loss design for an adjustable inductance element suitable for use in these parallel tank circuits. The application of an impedance matching circuit to a plasma process is also disclosed; in this context, a local impedance transformation circuit is used to improve power transfer to the plasma source antenna.
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申请公布号 |
US5574410(A) |
申请公布日期 |
1996.11.12 |
申请号 |
US19940336873 |
申请日期 |
1994.11.09 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
COLLINS, KENNETH S.;TROW, JOHN;RODERICK, CRAIG A.;PINSON, II, JAY D.;BUCHBERGER, II, DOUGLAS A.;HARTLAGE, ROBERT P.;SHEL, VIKTOR |
分类号 |
H01F21/02;H01F29/14;H01J37/32;H01L21/311;H03H7/38;H03H7/40;H03H11/30;H03J3/22;H05H1/46;(IPC1-7):H03H7/40 |
主分类号 |
H01F21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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