| 摘要 |
PURPOSE: To increase reproducibility of heating condition by providing a rotation symmetry heater and rings provided by isolating from a body to be heated and heaters, and thermocouples embedded into the rings and by controlling heater power based on the result of temperature measurement. CONSTITUTION: Rings 14, 15, 16 for detecting temperature made of a material having surface emissivity of >=0.3 such as alumina wherein thermocouples 28, 30, 29 are embedded, are set outside of divided heaters A, B, C and thereby radiation heat from these heaters to outside is absorbed. A seed crystal 2 of compound semiconductor such as GaAs or the like is attached to an upper shaft 6, and semiconductor raw material and liquid sealing agent 5 such as B2 O3 or the like are charged into a crucible 10 and pressure is reduced in a container, and then, N2 gas introduced under heating pressurizes the liquid sealing agent 5. Next, after melting the semiconductor raw material by heating up to melting point thereof, the seed crystal 2 begins to grow on seeding. While both the upper shaft 6 and a lower shaft 7 are made revolve, temperature fluctuation is restricted within about±0.2 deg.C by controlling heater power, based on the temperatures measured with thermocouples 28, 30, and 29. Thereby, the single crystal 1 is grown to be pulled up and is obtained in high yield.
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