发明名称 |
Method of making a quartz dome reactor chamber |
摘要 |
A method of making a quartz dome for a reactor chamber from a substantially flat quartz disk. The quartz disk is placed on a graphite ring which is rotated. The quartz disk is heated until the disk is softened slightly and it begins to slump. The softened portion of the disk is drawn by a change in pressure to contact a fixed wiper blade. The wiper blade controls the size and shape of the deformation of the quartz disk to form the dome surface.
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申请公布号 |
US5573566(A) |
申请公布日期 |
1996.11.12 |
申请号 |
US19950451926 |
申请日期 |
1995.05.26 |
申请人 |
ADVANCED SEMICONDUCTOR MATERIALS AMERICA, INC. |
发明人 |
ANDERBERG, DANE H.;BARNETT, LEWIS C. |
分类号 |
C03B23/025;C03B23/033;C03B23/035;(IPC1-7):C03B23/023 |
主分类号 |
C03B23/025 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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