发明名称 POSITIONING DEVICE
摘要 <p>PURPOSE: To shorten the substantial positioning time of a moving body and improve the performance, to eliminate the need to store correction quantities of respective pieces of target position information, and to perform accurate positioning flexibly corresponding to processes which are performed at different times from the movement end time of the moving body and alterations of a movement history. CONSTITUTION: The positioning device which moves the moving body 6 fast and positions it at a target position (D1) based on a 2nd part on a structure for positioning at a position based on a 1st part of the structure from the current position is equipped with a means 10 which finds the quantity of displacement of a 2nd part from a 1st part due to the deformation of the structure at the end time of the positioning or a quantity equivalent to it and a means which obtains a correction value for the target position on the basis of the displacement quantity or its equivalent quantity and corrects the target position or current position.</p>
申请公布号 JPH08297508(A) 申请公布日期 1996.11.12
申请号 JP19950124581 申请日期 1995.04.26
申请人 CANON INC 发明人 MAKITA YOSHINORI
分类号 G12B5/00;B23Q15/00;B23Q15/22;G05B19/18;G05B19/404;G05D3/12;H01L21/027;H01L21/68;(IPC1-7):G05B19/404 主分类号 G12B5/00
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