| 摘要 |
PURPOSE: To provide a micro-structure forming device and a method therefor capable of manufacturing a micro-structure used for a device such as a ULSI of 256M or above or a quantum effect element. CONSTITUTION: A scanning probe microscope equipped with a specimen holder 3 which holds a specimen 2, a probe 4, and a drive mechanism 5 is provided inside a reaction chamber 1 whose atmosphere is controllable, wherein a gas introduction mechanism 6 and a gas local exhaust mechanism 7 are provided very close to the surface of the specimen 2. The probe 4 is formed of platinum- iridium and located at the tip of a cantilever 8, and reaction gas is mainly composed of hydrogen. Therefore, a micro-structure forming device and a method which are capable of processing a microstructure stably and continuously at a high speed under a condition that the tip of the probe 4 is kept free from a certain ambient influence which is liable to occur when a microstructure is formed with a scanning electron probe microscope can be realized.
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