发明名称 |
Method and apparatus for fine processing |
摘要 |
An apparatus for fine processing includes a support for supporting a material to be processed, an active layer forming device for forming an active layer on the surface of the material by irradiating the material with light in a reaction gas, a latent image forming device for selectively irradiating the active layer with energy in the reaction gas to form a latent image, a shield mask forming device for removing either the latent image layer or the active layer to form a shield mask and an etching device for etching the portion other than the mask portion using the portion left unetched as the shield mask.
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申请公布号 |
US5573891(A) |
申请公布日期 |
1996.11.12 |
申请号 |
US19950393562 |
申请日期 |
1995.02.23 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
SATO, YASUE;KOMATSU, TOSHIYUKI;KAWATE, SHINICHI |
分类号 |
H01L21/28;G03F7/004;G03F7/16;H01L21/027;H01L21/033;H01L21/302;H01L21/3065;H01L21/308;(IPC1-7):G03C5/00 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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