发明名称 Semiconductor voltage sensing device
摘要 The present invention provides a semiconductor device which is excellent in voltage sense characteristic and simple in manufacturing process. P diffusion regions 12 and 13 are selectively formed on a first major surface of an N- substrate 11, an electrode 31 is formed on the P diffusion region, a sense electrode 32 is formed on the P diffusion region 13, and an electrode 33 is formed on a second major surface of the N- substrate. Then, the electrode 31 is set at 0 V, constant current is led to the sense electrode 32, and the electrode 33 is positively biased. Thus, the voltage applied to the electrode 33 is sensed from a potential obtained at the sense electrode 32. A distance between the P diffusion regions 12 and 13 which determines a voltage sense characteristic can be accurately controlled, and a good voltage sense characteristic can be obtained. Moreover, a manufacturing process is relatively simple.
申请公布号 US5574303(A) 申请公布日期 1996.11.12
申请号 US19940325633 申请日期 1994.10.19
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 TERASIMA, TOMOHIDE;TABATA, MITUHARU;YOSHIZAWA, MASAO;SATSUMA, KAZUMASA
分类号 H01L21/66;G01R19/00;H01L29/06;H01L29/735;H01L29/739;(IPC1-7):H01L29/76;H01L29/94 主分类号 H01L21/66
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