发明名称 Apparatus for controlling light quantity using acousto-optic modulator for selecting 0th-order diffracted beam
摘要 An apparatus for controlling a light quantity comprises a light source for emitting light and an acousto optical modulating element, having a driving unit for giving a progressive wave to a medium, for generating 0th-order and higher-order diffracted beams of light by an acousto optical effect of the progressive wave. The apparatus also comprises a stop element which transmits, not the higher-order diffracted beams, but the 0th-order diffracted beam; and a drive controlling section for varying a quantity of light irradiating an object by regulating the progressive wave through the driving unit.
申请公布号 US5574537(A) 申请公布日期 1996.11.12
申请号 US19940227237 申请日期 1994.04.13
申请人 NIKON CORPORATION 发明人 OZAWA, KEN
分类号 H01L21/30;G03F7/20;H01S3/10;(IPC1-7):G03B27/72 主分类号 H01L21/30
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