发明名称 SEMICONDUCTOR DEVICE HAVING DOUBLE WELL STRUCTURE AND ITS MANUFACTURE
摘要 PURPOSE: To provide a semiconductor device and its manufacture, which has a double well construction and is capable of simplifying the processes, by reducing the intervals between a nearby circuit P well and a memory cell P well, and by introducing a self-matching self-aligned well process and reducing photolithographic processes required for well formation. CONSTITUTION: In a semiconductor device where a P-well having a concentration higher than that of the silicon substrate 110 is formed on a P-type silicon substrate 110 and an N-well is formed so as to surround the P-well, the concentration of a region 115 existing in the lateral direction of the substrate surface at a N-well portion is made higher than the concentration of an N-type well region 113 in a lower portion of P-well.
申请公布号 JPH08298291(A) 申请公布日期 1996.11.12
申请号 JP19950103574 申请日期 1995.04.27
申请人 OKI ELECTRIC IND CO LTD 发明人 SHINOHARA HIROBUMI;SUZUKI KAZUYA;NAGATOMO YOSHIKI
分类号 H01L21/8238;H01L21/8242;H01L27/092;H01L27/108 主分类号 H01L21/8238
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