METHOD AND DEVICE FOR DRY ETCHING,申请号JP19950103752-传众专利搜索

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发明名称	METHOD AND DEVICE FOR DRY ETCHING
摘要
申请公布号	JPH08298259(A)	申请公布日期	1996.11.12
申请号	JP19950103752	申请日期	1995.04.27
申请人	NEC CORP	发明人	WAKAHARA TAKESHI
分类号	C23F4/00;H01J37/32;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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