Verbessertes Verfahren zur Neuordnung von kristallinen Strukturen in legierten oder nicht-legierten Halbleitern mittels Laserimpulsen
摘要
A process for the rearrangement of crystalline structures in alloyed or unalloyed semiconductors by means of laser pulses is described, the power of the laser pulses being less than the power at which the material is damaged or the component having the lowest vapour pressure for the amorphous material is volatilised, and said pulses being repeated at such intervals that temperature increases are precluded which initiate the volatilisation of the component having the highest vapour pressure.
申请公布号
DE3510204(C2)
申请公布日期
1996.11.07
申请号
DE19853510204
申请日期
1985.03.21
申请人
UNIVERSITA' DEGLI STUDI DI ROMA "LA SAPIENZA", ROM/ROMA, IT