| 摘要 |
<p>A method for qualifying a chemical distribution system (10) and one or more components used therein including tanks, valves, filters (20), pump (26), test component (24) and tubing to ensure that the quantity of surface and bulk contaminants extracted from the system by the liquid chemical is below a predetermined specification level. A known volume of the liquid chemical is continuously circulated through the system of the tank (12), pump (26), filter (20) and line (14), which causes a continuous circulation of the liquid chemical past the one or more components being qualified. The concentrations of extracted contaminants in the circulated chemical volume are periodically measured, and the contaminant extraction rate determined as a function of such concentration measurements. The system is qualified for production when the extraction rate has decreased to the specification level, as indicated by periodically removing samples of the liquid chemical from the line (14) out thru valve (28) for chemical analysis of each released sample.</p> |
