Isolatorauftrag unter Verwendung eines fokussierten Ionenstrahls,申请号DE19961017027-传众专利搜索

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发明名称	Isolatorauftrag unter Verwendung eines fokussierten Ionenstrahls
摘要
申请公布号	DE19617027(A1)	申请公布日期	1996.11.07
申请号	DE19961017027	申请日期	1996.04.27
申请人	SCHLUMBERGER TECHNOLOGIES INC., SAN JOSE, CALIF., US	发明人	XIMEN, HONGYU, SAN JOSE, CALIF., US;CECERE, MICHAEL C., SAN JOSE, CALIF., US;MASNAGHETTI, DOUGLAS, SAN JOSE, CALIF., US
分类号	C23C16/48;C23C16/04;C23C16/40;H01L21/316;H01L21/768;(IPC1-7):H01L21/31;H01J37/317	主分类号	C23C16/48
代理机构		代理人
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